What are MEMS?
ØMicroelectromechanical systems (MEMS) are
very small devices or groups of devices that can integrate both mechanical and electrical
components.
Ø MEMS can be
constructed on one chip that contains one or more micro-components and the electrical circuitry for inputs and outputs of the components.
Ø The
components include different types of sensors, transducers, actuators, electronics and structures (e.g. gears, sliding mirrors, diaphragms).
Ø Each type of
components is designed to interface with an input such
as light, gas molecules, and a specific type of radiation, pressure, temperature, or biomolecules.
Micro-Electro-Mechanical-Systems
(MEMS) are batch-fabricated
(micro-fabricated) systems that contains both electrical and mechanical
components with characteristic sizes ranging
from Nano-meters to millimeters.
Other Names
Micro-Electro-Mechanical Systems (MEMS): Widely used in Americas
MicroSystems Technology (MST) : Popular in Europe
Micromachines : Used in Japan
Microscience: Some people prefer to call it this way as they
begin to explore
scientific aspects of MEMS.
Hi,
ReplyDeleteI am struggling to build my first RF MEMS (cantilever type) in the clean room but I cannot achieve a thick photoresist as the sacrificial layer. I need around 22um thick, does anyone know how can I get that?